Lam Research AutoEtch 590/490/690 Oxide Etcher Manufacturer:Lam Research Condition:Refurbished to OEM SPEC(Installation and warranty are optional) Price:Contact Us Now Location:California,USA Amount: 4 sets Description for reference only(One of the unit). Wafer Size Capacity:4 to 6 inch The system includes the following. 1. Send Indexer 2. Receive ...">

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              Home > Electronic, IT & Office Equipment > Electronic Manufacturing Machinery > Dry Asher Etcher RIE ICP Equipment Lam Research AutoEtch 5
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              Dry Asher Etcher RIE ICP Equipment Lam Research AutoEtch 5
              Dry Asher Etcher RIE ICP Equipment > Lam Research AutoEtch 590/490/690 Oxide Etcher

              Manufacturer:Lam Research
              Condition:Refurbished to OEM SPEC(Installation and warranty are optional)
              Price:Contact Us Now
              Location:California,USA
              Amount: 4 sets
              Description for reference only(One of the unit).
              Wafer Size Capacity:4 to 6 inch
              The system includes the following.
              1. Send Indexer
              2. Receive Indexer
              3. Entrance Lifter
              4. Exit Lifter
              5. 4 Pin Lifter
              6. Gap Assembly
              7. Lower Match Assembly
              8. Upper Electrode Assembly
              9. Lower Electrode Assembly
              10. 5 MFC Gas Box
              11. Main Power Supply
              12. Main Chamber Generator
              13. 2 Recipe Modules, 2 Master Modules
              14. Front & Rear EMO Switches
              15. Panels & Plexi Glass Covers (Standalone System)
              16. Main Chamber, Hex Plate, Orifice Ring, Pump Ring
              17. 2 Channel Endpoint Detector
              Please also refer to Lam Research 4520 Rainbow Oxide Etcher; Lam Research 4420 Rainbow Nitride Poly Etcher;Lam Research AutoEtch 490 Nitride Poly Etcher.

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